Diaphragm Valve

UHP

UHP

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VDV52UB pneumatic actuator - Diaphragm Valve

Diaphragm Valve

Diaphragm Valve

Product FeaturesProduct Features

Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
Direct diaphragm construction with superior sealing performance, remarkable durability, compactness and particle and dead-space-free performance
Valve open and closed position is easily visible at a glance
Excellent gas displacement characteristics
EP treatment is standard for all wetted surfaces
Standard seat material is PCTFE, Polyimide/PFA is option

ParameterParameter

Max. Working Pressure
300 psig (20 bar)
Pneumatic Operating Pressure
58~87psig (4-6bar)
Max. Working Temp.
14oF ~ 176oF (-10oC ~ 80oC)
Surface finish
10μin. Ra
Internal Leakage Allowance
<1x10-9 mbar I/s He
External Leakage Allowance
<1x10-9 mbar I/s He
Flow capacity
1/4”Cv=0.3 3/8”1/2”Cv=0.65

Material QualityMaterial Quality

Body
316L / 316L secondary remelt
Diaphragm
Elgiloy®
Seat packing
PCTFE