15μin. Ra max, 10μin Ra average surface finish (10μin. Ra max, 7μin. Ra max. 5μin. Ra max optional)
Minimized internal volume for short purge times
All materials used meet ASTM A479 / A484 / A276 standards
Internal connectors for pressure gauges
Flow capacity: to 30 slpm (standard), to 120 slpm (optional)
High control accuracy
Metal-to-metal seal to atmosphere
Simple outlet pressure limitation by hand-wheel
100% helium-leak-tested
Tied-diaphragm design
ParameterParameter
Inlet pressure P1
max. 3500 psig
Outlet pressure P2
10/30/60/100/150 psig
Surface finish
15μin. Ra max, 10μin Ra average surface finish (10μin. Ra max, 7μin. Ra max. 5μin. Ra max optional)
Inlets and Outlets
1/4” / 3/8” VFS fitting and tube weld
Bonnet port
1/8” NPT (on panel mount option, bonnet port is not threaded)
Temperature range
-40oF to +160oF (-40oC to +71oC)
External Leakage Allowance
<1x10-9 mbar I/s He
Internal Leakage Allowance
<1x10-8 mbar I/s He
Flow capacity
Cv=0.09 (Cv=0.15 optional)
Supply pressure effect
0.35 psig rise in delivery pressure per 100 psig source pressure drop @Cv=0.09；0.5psig rise in delivery pressure per 100 psig source pressure drop @Cv=0.15
