VSR-910UB SERIES

Product Feature

• Single-stage pressure regulator
• 15μin. Ra max. 10μin Ra max optional
• design for bulk special gas suply system
• Tied diaphragm design with bellows sensny element
• All gas-wetted parts made of stainless steel SS 316L,
Hastelloy C276 and PCTFE respectively
• Metal-to-metal seal to atmosphere
• 100% helium-leak-tested

 

Technical Data

• Type: single-stage
• Inlet pressure P1: max. 800 psig
• Outlet pressure P2: 30/60/100/150 psig
• Surface finish: 15μin. Ra max  /  10μin. Ra max (optional)
Materials
• Body: SS 316L
• Valve seat: PCTFE (Vespel® optional)
• Diaphragm: Hastelloy® C276 / 316L
• Inlets and Outlets: 1/2” / 3/4” or 1” face seal or tube weld
• Bonnet port: 1/8” FNPT(option)
• Temperature range: -40oF to +160oF (-40oC to +71oC)
• Leak rate:

(to atmosphere) 1x10-9 mbar I/s He
(via seat) 1x10-8 mbar I/s He
• Flow capacity: Cv=4
• Weight: 6.7kg

 

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