Product Feature

• Single-stage pressure regulator
• 15μin. Ra max, 10μin. Ra average surface finish (10μin. Ra max,
7μin. Ra max, 5μin. Ra max optional)
• Minimized internal volume for short purge times
• All gas-wetted parts made of stainless steel SS 316L,
Hastelloy C276 and PCTFE respectively
• Internal connectors for pressure gauges
• Force conpensation has wider flow cupacity
• High control accuracy
• Metal-to-metal seal to atmosphere
• Simple outlet pressure limitation by hand-wheel
• 100% helium-leak-tested
• Tied-diaphragm design


Technical Data

• Type: single-stage
• Inlet pressure P1: max. 1700 psig
• Outlet pressure P2: 30/60/100/150 psig
• Surface finish: 15μin. Ra max / 10μin. Ra avg (10μin. Ra max., 7μin. Ra max., 5μin. Ra max optional)
• Body: see ordering info
• Valve seat: PCTFE (Vespel® optional)
• Diaphragm: Hastelloy® C276
• Inlets and Outlets: 1/4” / 3/8” / 1/2” or 3/4” face seal or tube weld
• Bonnet port: 1/8” NPT(F) (on panel mount option, bonnet port is not threaded)
• Temperature range: -40oF to +160oF (-40oC to +71oC)
• Leak rate: 

(to atmosphere)1x10-9 mbar I/s He
(via seat)1x10-8 mbar I/s He
• Flow capacity: Cv=0.65, Cv=1.1 (HF optional)
• Weight: approx. 2.0kg
• Supply pressure effect:

3.5 psig rise in delivery pressure per
100 psig source pressure drop
4.2 psig rise in delivery pressure per
100 psig source pressure drop (FC option)


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