Product Features

  1. Single-stage pressure regulator
    15 μin. Ra max, 10μin Ra average surface finish (10 μin.Ra max,7μin. Ra max,5 μin. Ra max optional)
    Minimized internal volume for short purge times
    All gas-wetted parts made of stainless steel SS 316L,Hastelloy C276 and PCTFE respectively
    Internal connectors for pressure gauges
    Flow capacity: to 100 slpm
    High control accuracy
    Metal-to-metal seal to atmosphere
  2. Simple outlet pressure limitation by hand-wheel
  3. 100 % helium-leak-tested
    Cleaned for O2 service


Technical Data


  • Type single-stage
    Inlet pressure P1 max. 3500 psig
    Outlet pressure P2 10/30/60/100 psig
    Surface finish
    15μin.Ra max/10μin.Ra avg(10 μin.Ra
    max.,7μin.Ra max.,5μin.Ra max optional)
    Body see ordering info
    Valve seat PCTFE
    Diaphragm Hastelloy®C276
    Inlets and Outlets 1/4” / 3/8” or 1/2" face seal or tube weld
    Bonnet port 1/8" NPT(on panel mount option,bonnet port
    is not threaded)
    Temperature range: -40°F to +160°F (-40°C to +71°C)
    Leak rate (to atmosphere): 1x10-9 mbar I/s He
    Leak rate (via seat): 1x10-8 mbar I/s He
    Flow capacity: Cv=0.13
    Weight approx.1.54 kg(depending on connections and options )
    Supply pressure effect:0.25 psig rise in delivery pressure per 100
    psig source pressure drop
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