Product Features

• Single-stage pressure regulator
• 10μin. Ra surface finish
• Minimized internal volume for short purge times
• All gas-wetted parts made of stainless steel SS 316L,
Hastelloy C276 and PCTFE respectively
• Internal connectors for pressure gauges
• Flow capacity: to 2000 slpm
• High control accuracy
• Metal-to-metal seal to atmosphere
• Simple outlet pressure limitation by hand-wheel
• 100% helium-leak-tested
• Cleaned for O2 service
• Tied-diaphragm design


Technical Data

  • Type: single-stage
    Inlet pressure P1: max. 300 psig
    Outlet pressure P2: 30/60/100/150 psig
    Surface finish: 10μin. Ra
    Body: see ordering info
    Valve seat: PFA (Vespel® optional)
    Diaphragm: Hastelloy® C276
    Inlets and Outlets: 3/4” / 1” face seal or tube weld
    Bonnet port: 1/8” FNPT(option)
    Temperature range: -40℉ to +160℉ (-40℃ to +71℃)
    Leak rate: (to atmosphere) 1x10-9 mbar I/s He
                     (via seat) 1x10-8 mbar I/s He
    Flow capacity: Cv=1.6
    Weight: approx. 2.72kg (depending on connections or options)
    Supply pressure effect: 7 psig rise in delivery pressure per 100 psig source pressure drop


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