Product Features

• Single-stage pressure regulator
• 10μin. Ra surface finish
• Minimized internal volume for short purge times
• All gas-wetted parts made of stainless steel SS 316L,
   Hastelloy C276 and PCTFE respectively
• Internal connectors for pressure gauges
• Flow capacity: to 2000 slpm
• High control accuracy
• Metal-to-metal seal to atmosphere
• Simple outlet pressure limitation by hand-wheel
• 100% helium-leak-tested
• Cleaned for O2 service
• Tied-diaphragm design


Technical Data

• Type: single-stage
• Inlet pressure P1: max. 300 psig
• Outlet pressure P2: 30/60/100/150 psig
• Surface finish: 15μin. Ra max / 10μin. Ra avg (10μin. Ra max optional)
• Body: see ordering info
• Valve seat: PFA (Vespel® optional)
• Diaphragm: Hastelloy® C276
• Inlets and Outlets: 3/4”/ 1” face seal or tube weld
• Bonnet port: 1/8” FNPT(option)
• Temperature range: -40oF to +160oF (-40oC to +71oC)
• Leak rate:

(to atmosphere) 1x10-9 mbar I/s He

(via seat) 1x10-8 mbar I/s He
• Flow capacity: Cv=1.6

• Weight: approx. 2.72kg (depending on connections or options)

• Supply pressure effect: 7 psig rise in delivery pressure per 100 psig source pressure drop


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