Product Features


  1. Suitable for ultra pure,flammable or toxic fluid lines in semiconductor
    manufacturing equipment and facilities
     Direct diaphragm construction with superior sealing
    prerformance,remarkable durability,compactness and particle and
    dead-space-free performance
    Valve open and closed opsition is easily visible at a glance.
     Excellent gas displacement characteristics
    EP treatment is standard for all wetted sufaces
    Standard seat material is PCTFE,Polyimide/PFA is option


Technical Data


  • Max. Working Pressure 3000 psig (205 bar)
    Pneumatic Operating Pressure 58~87psig (4~6 bar)
    Max. Working Temp. -10˚F ~ 150˚F (-23˚C ~ 65˚C)
    Body 316L secondary remelt
    Diaphragm Elgiloy®
    Seat packing PCTFE(standard)
    Handle AL
    Internal Leakage Allowance(He) 1 x 10-9 atm • cc/sec
    External Leakage Allowance (He) 1 x 10-9 atm • cc/sec
    Orifice Ø5 mm
    Weight approx. 0.27 kg(actuator not included)

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