Product Features

• Suitable for ultra pure, flammable or toxic fluid lines in semiconductor
   manufacturing equipment and facilities
• Direct diaphragm construction with superior sealing
   prerformance,remarkable durability,compactness and particle and
   dead-space-free performance
• Valve open and closed opsition is easily visible at a glance.
• Excellent gas displacement characteristics
• EP treatment is standard for all wetted sufaces
• Standard seat material is PEEK,Polyimide/PFA is option


Technical Data

  • • Max. Working Pressure: 3000 psig (205 bar)
    • Pneumatic Operating Pressure: 58~87psig (4-6bar)
    • Max. Working Temp.: -10oF ~ 150oF (-23oC ~ 65oC)
    • Surface finish: 10μin. Ra
    • Body: see ordering info
    • Diaphragm: Elgiloy®
    • Seat packing: PEEK
    • Handle: AL
    • Internal Leakage Allowance: 1x10-9 mbar I/s He
    • External Leakage Allowance: 1x10-9 mbar I/s He
    • Orifice: Ф2.5mm
    • Weight: approx. 0.27kg (actuator not included)

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