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VDV32UB pneumatic actuator - Diaphragm Valve
Diaphragm Valve
Diaphragm Valve
Product FeaturesProduct Features
  • Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
  • Direct diaphragm construction with superior sealing performance, remarkable durability, compactness and particle and dead-space-free performance
  • Valve open and closed position is easily visible at a glance
  • Excellent gas displacement characteristics
  • EP treatment is standard for all wetted surfaces
  • Standard seat material is PCTFE, Polyimide/PFA is option
ParameterParameter
  • Max. Working Pressure
    150 psig (10 bar)
  • Pneumatic Operating Pressure
    58~87psig (4-6bar)
  • Max. Working Temp
    14oF ~ 176oF (-10oC ~ 80oC)
  • Surface finish
    10μin. Ra
  • Internal Leakage Allowance
    <1x10-9 mbar I/s He
  • External Leakage Allowance
    <1x10-9 mbar I/s He
  • Flow capacity
    1/4”Cv=0.3 3/8”1/2”Cv=0.65
Material QualityMaterial Quality
  • Body
    316L / 316L secondary remelt
  • Diaphragm
    Elgiloy®
  • Seat packing
    PCTFE
Download
VIGOUR
Tel
+86-21-67600902
E-mail
info@vigourco.com

Record Num.：ICP:16055337-1