Pressure Regulator

UHP

UHP

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VSR-910UB - Pressure Regulator

Pressure Regulator

Pressure Regulator

Product FeaturesProduct Features

Single-stage pressure regulator
15μin. Ra max. 10μin Ra max optional
design for bulk special gas supply system
Tied-diaphragm design with bellows sensing element
All materials used meet ASTM A479 / A484 / A276 standards
Metal-to-metal seal to atmosphere
100% helium-leak-tested

ParameterParameter

Inlet pressure P1
max. 3000 psig
Outlet pressure P2
30/60/100/150 psig
Surface finish
15μin. Ra max， 10μin. Ra max (optional)
Inlets and Outlets
1/2” / 3/4” or 1” VFS fitting or tube weld
Bonnet port
1/8” FNPT(optional)
Temperature range
-40oF to +160oF (-40oC to +71oC)
Leak rate (to atmosphere)
<1x10-9 mbar I/s He
Leak rate (via seat)
<1x10-8 mbar I/s He
Flow capacity
Cv=3.0 / Cv=4.0

Material QualityMaterial Quality

Body
SS 316L
Valve seat
PCTFE (Vespel® optional)
Diaphragm
Hastelloy® C276