Gas Stick Assemblies

UHP

UHP

Current Location

VUP - Gas Stick Assemblies

Gas Stick Assemblies

Gas Stick Assemblies

Product FeaturesProduct Features

Ultra high purity gas stick for all gas delilery systems
100TG: ≤30 slpm delivery 1/4” VFS
200TG: ≤300 slpm delivery 3/8” VFS
300TG: ≤600 slpm delivery 1/2” VFS
High control accuracy
All connections welded or VFS
Manual or pneumatic diaphragm valve option
100% Helium-leak-tested

ParameterParameter

Inlet pressure P1
300 psig
Outlet pressure P2
30/60/100/150 psig
Leak rate (to atmosphere)
1x10-9 mbar I/s He
Leak rate (via seat)
1x10-8 mbar I/s He

Material QualityMaterial Quality

Body（diaphragm valve)）
316L
Valve seat（diaphragm valve)）
PCTFE
Diaphragm（diaphragm valve)）
Elgiloy®
Body（Regulator）
316L / 316L secondary remelt
Valve seat（Regulator）
PCTFE
Valve seat（Regulator）
Hastelloy® C276