VGC Series

GDS

GDS

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VGC Series

VGC Series

Product FeaturesProduct Features

Continuous and uninterrupted safe supply of electronic-grade specialty gases.
Optional evacuation and purging functions, with safety pressure relief.
Class 100 cleanroom welded assembly.
Optional PLC control with communication interface, which can be accessed by the intelligent monitoring platform system.
High pressure / Low pressure alarm with audible and visual signals, capable of emergency shutoff.
10" display screen showing cylinder pressure and other data.

ParameterParameter

Applicable gases
Flammable/self-igniting gases, corrosive gases, toxic gases (e.g., SiH4, HCl)
Gas Supply Method
Gas cylinder
Power Supply
110~240V AC
Configurations
Single-cylinder, dual-cylinder
Enclosure
Corrosion-resistant welded steel
Glass Window
Switchable, 1/4" wire-reinforced glass
Door
Auto-closing
Exhaust Pipe
Top-mounted exhaust pipe

Material QualityMaterial Quality

Valves
SS 316L
piping components
SS 316L