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VDV40UB manual actuator - Diaphragm Valve
Diaphragm Valve
Diaphragm Valve
Product FeaturesProduct Features
  • Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
  • Direct diaphragm construction with superior sealing performance, remarkable durability, compactness and particle free performance
  • Valve open and closed position is easily visible at a glance
  • Excellent gas displacement characteristics
  • EP treatment is standard for all wetted surfaces
  • Standard seat material is PCTFE, Polyimide is option
ParameterParameter
  • Operating Pressure
    3000 psig (206 bar)
  • Max. Working Temp.
    -40oF ~ 160oF (-40oC ~ 71oC)
  • Surface finish
    10μin. Ra
  • Internal Leakage Allowance
    <1x10-9 mbar I/s He
  • External Leakage Allowance
    <1x10-9 mbar I/s He
  • Flow capacity
    气动 Cv=0.23 手动 Cv=0.29
Material QualityMaterial Quality
  • Body
    316L / 316L secondary remelt
  • Diaphragm
    Elgiloy®
  • Seat packing
    PCTFE