Diaphragm Valve

UHP

UHP

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VDV39UB - Diaphragm Valve

Diaphragm Valve

Diaphragm Valve

Product FeaturesProduct Features

Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
Direct diaphragm construction with superior sealing performance, remarkable durability, compactness and particle and dead-space-free performance
Valve open and closed position is easily visible at a glance
Excellent gas displacement characteristics
EP treatment is standard for all wetted surfaces
Standard seat material is PCTFE, Polyimide is option

ParameterParameter

Max. Working Pressure
270 psig (18.6 bar)
Max. Working Temp.
14oF ~ 176oF (-10oC ~ 80oC)
Surface finish
10μin. Ra
Internal Leakage Allowance
<1x10-9 mbar I/s He
External Leakage Allowance
<1x10-9 mbar I/s He
Flow capacity
Cv=2.8

Material QualityMaterial Quality

Body
316L / 316L secondary remelt
Diaphragm
Elgiloy® (316L 可选)
Seat packing
PCTFE (PFA / Vespel® 可选)